AUTO DECAP SYSTEM
HOME > PRODUCT > AUTO DECAP SYSTEM
   
 
MIS Wet Etch  
 
- Automatic chemical decapsulation equipment
- Various systems available by customer
  requirements and different functions
  > Package Full Decap System
  > Package Hole Decap System
  > Wafer(Die) Decap System
  > Single/Dual line available
     (Dual line: Each controller for a line)
  > Customer selected chemicals can be applicable
  > Customized Carrier Jig for different systems
  > Multiple samples can be applied

- User’s safer and convenient operation
  > Automatic chemical supply & drain system
  > Enhanced fume exhaust : Double exhaust
     system(Bath & Room exhaust)
  > Safety Interlock system
  > Bath cleaning function included

- Self-developed SW program
  > Customer required recipes applicable

- Glove box system available(Option)
  > Chemical supply box integration applicable

 
 
 
 
   
Company l Product l Customer l Global Network l IR Material l Q&A/News