|
|
|
|
Function & Features |
|
|
- Automatic chemical decapsulation equipment
- Various systems available by customer
requirements and different functions
> Package Full Decap System
> Package Hole Decap System
> Wafer(Die) Decap System
> Single/Dual line available
(Dual line: Each controller for a line)
> Customer selected chemicals can be applicable
> Customized Carrier Jig for different systems
> Multiple samples can be applied
- User¡¯s safer and convenient operation
> Automatic chemical supply & drain system
> Enhanced fume exhaust : Double exhaust
system(Bath & Room exhaust)
> Safety Interlock system
> Bath cleaning function included
- Self-developed SW program
> Customer required recipes applicable
- Glove box system available(Option)
> Chemical supply box integration applicable
|
|
|
|
|
|